X-RAY ANALYSIS DEVICE

Japanese Patent JP3711410

B2

PROBLEM TO BE SOLVED: To improve the analysis accuracy by spraying the gas containing oxygen against the surface of a sample to be analyzed during the irradiation of the ultraviolet ray to surely remove the carbon substance adhered to the surface to be analyzed.
SOLUTION: A sample 1 is installed at the position opposite to a lower opening 30 of a casing 31 of an ultraviolet ray irradiation device 3, a vacuum pump 23 is driven in a condition where an opening window is closed, and a vacuum chamber 20 is evacuated until the pressure inside reaches the prescribed value for the X-ray analysis. When the pressure in the vacuum chamber reaches the prescribed value, the gas containing oxygen is sprayed between the opening 30 and a surface 10 to be analyzed of the sample 1 from a nozzle part 72 of a gas injection pipe 71, and the ultraviolet ray is irradiated from an ultraviolet ray source while increasing the oxygen concentration therearound. A large volume of ozone is generated around the surface 10 to be analyzed, i.e., the space around the surface 10 to be analyzed is in the ozone environment, the carbon substance adhered to the surface 10 to be analyzed is decomposed and evaporated and removed by the ozone and ultraviolet ray to provide the clean surface to be analyzed, and correctness and accuracy of the analysis are improved.

JP2016017759	X-RAY MEASUREMENT MODULE AND FLUORESCENT X-RAY ANALYSIS APPARATUS EQUIPPED WITH A PLURALITY OF THE SAME
JPS61148310	FLUORESCENT X-RAY FILM

Utaka Tadashi

JP1004597A

November 02, 2005

January 23, 1997

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Rigaku Denki Kogyo Co., Ltd.

G01N23/223; H01L21/304; H01L21/66; (IPC1-7): G01N23/223

JP59224548A
JP5288695A
JP3503662A
JP47030851Y1

Shuji Sugimoto
Masashi Noda

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