X-RAY MEASUREMENT MODULE AND FLUORESCENT X-RAY ANALYSIS APPARATUS EQUIPPED WITH A PLURALITY OF THE SAME

Title:

X-RAY MEASUREMENT MODULE AND FLUORESCENT X-RAY ANALYSIS APPARATUS EQUIPPED WITH A PLURALITY OF THE SAME

Document Type and Number:

Japanese Patent JP2016017759

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide an X-ray measurement module capable of eliminating scattered light and performing analysis with high sensitivity and high accuracy in a general-purpose analysis, and also capable of downsizing and cost reduction, and further to provide a multi-element simultaneous type fluorescent X-ray analysis apparatus equipped with a plurality of X-ray measurement modules and capable of downsizing and cost reduction.SOLUTION: An X-ray measurement module 1 of the present invention comprises: an entrance slit 2 having a rectangular opening through which X-ray passes; a double-curved X-ray spectroscopic device 4, with a diffraction plane double-curved concavely, for diffracting X-ray 3 passed through the entrance slit and converging it into a circular arc shape; an emission slit 6, having a circular arc opening, for passing through X-ray 5 diffracted and converged into the circular arc shape by the double-curved X-ray spectroscopic device 4 without excess and deficiency; and an X-ray detector 7 for measuring intensity of the X-ray passed through the emission slit 6.SELECTED DRAWING: Figure 1

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Inventors:

NAKANO ASAO
SHOJI TAKASHI
KAWAHARA NAOKI

Application Number:

JP2014138663A

Publication Date:

February 01, 2016

Filing Date:

July 04, 2014

Export Citation:

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