Title:
A constituent for polish, a manufacturing method for the same, and a magnetic polishing method
Document Type and Number:
Japanese Patent JP6220090
Kind Code:
B2
Abstract:
Provided are a polishing composition, in which oxidation of magnetic particles hardly occurs, and a magnetic polishing method. The polishing composition (1) contains magnetic particles, an antioxidant for suppressing oxidation of the magnetic particles, and water. A magnetic field is applied to the polishing composition (1) to form a magnetic cluster (3) that contains the magnetic particles, and the magnetic cluster (3) is brought into contact with an object (5) to be polished, to polish the object (5) to be polished.
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Inventors:
Shuichi Tamada
Morinaga Hitoshi
Shota Hishida
Daisuke Yasui
Morinaga Hitoshi
Shota Hishida
Daisuke Yasui
Application Number:
JP2017044074A
Publication Date:
October 25, 2017
Filing Date:
March 08, 2017
Export Citation:
Assignee:
Fujimi Incorporated Co., Ltd.
International Classes:
C09K3/14; B24B31/112; B24B37/00
Domestic Patent References:
JP2010214505A | ||||
JP2002544318A | ||||
JP2014095031A |
Foreign References:
CN1959871A | ||||
WO2015046525A1 |
Attorney, Agent or Firm:
Tetsuya Mori
Suzuki Isobe
Hide Tanaka Tetsu
Yuki Yamada
Suzuki Isobe
Hide Tanaka Tetsu
Yuki Yamada
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