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Title:
A formation method of a substrate
Document Type and Number:
Japanese Patent JP6158190
Kind Code:
B2
Abstract:
A substrate including a body comprising a Group III-V material and having an upper surface, the body comprising an offcut angle defined between the upper surface and a crystallographic reference plane, and the body further having an offcut angle variation of not greater than about 0.6 degrees.

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Inventors:
Jean-Pierre, Foley
Bernard, Beaumont
Application Number:
JP2014533397A
Publication Date:
July 05, 2017
Filing Date:
September 28, 2012
Export Citation:
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Assignee:
SAINT-GOBAIN CRISTAUX & DETECTEURS
International Classes:
C30B29/38; C30B33/00; H01L21/20
Domestic Patent References:
JP2007284283A
JP2007161534A
JP2011016680A
JP2005350315A
Attorney, Agent or Firm:
Yukitaka Nakamura
Hirohito Katsunuma
Noritaka Yokota



 
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