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Title:
An imprint device, a manufacturing method of the article using it
Document Type and Number:
Japanese Patent JP6230650
Kind Code:
B2
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Inventors:
Tatsuya Hayashi
Kei Hasegawa
Application Number:
JP2016092326A
Publication Date:
November 15, 2017
Filing Date:
May 02, 2016
Export Citation:
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Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
JP2013089663A
JP2004259985A
JP2009298041A
JP5932286B2
Foreign References:
WO2009153925A1
Attorney, Agent or Firm:
Ryoichi Takaoka



 
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