Title:
研磨パッド及び研磨パッドの製造方法
Document Type and Number:
Japanese Patent JP5555460
Kind Code:
B2
More Like This:
Inventors:
Hideaki Nishizawa
Takao Kawai
Yoshida Koichi
Shin-ichi Haba
Nobuyuki Oshima
Takao Kawai
Yoshida Koichi
Shin-ichi Haba
Nobuyuki Oshima
Application Number:
JP2009202851A
Publication Date:
July 23, 2014
Filing Date:
September 02, 2009
Export Citation:
Assignee:
Nitta Haas, Inc.
International Classes:
B24B37/24; H01L21/304
Attorney, Agent or Firm:
Noboru Fujimoto
Hiroaki Nakatani
Hill Yuichi
Hiroaki Nakatani
Hill Yuichi