Title:
VIBRATION DEVICE
Document Type and Number:
Japanese Patent JP2022146150
Kind Code:
A
Abstract:
To provide a vibration device that is small-sized and has stable frequency characteristics.SOLUTION: A vibration device 1 has a second package 10 and a lid 16. The second package 10 has a first package 31 and a heater 20. The first package 31 has a vibration element 60, a base substrate 32, an integrated circuit 40, and a lid 33. The base substrate 32 has a first surface 32a and a second surface 32b in the front-and-back relationship with the first surface 32a and includes single crystal silicon. The vibration element 60 is arranged on the first surface 32a of the base substrate 32. The integrated circuit 40 is provided on the first surface 32a or the second surface 32b and includes a temperature sensor 46. The lid 33 is joined to the base substrate 32 to accommodate the integrated circuit 40 and the vibration element 60.SELECTED DRAWING: Figure 2
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Inventors:
NOMURA NORIO
Application Number:
JP2021046972A
Publication Date:
October 05, 2022
Filing Date:
March 22, 2021
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03B5/32; H01L23/04
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura