Title:
AIR FLOW RATE METER
Document Type and Number:
WIPO Patent Application WO/2023/073791
Kind Code:
A1
Abstract:
This air flow rate meter comprises a housing having an auxiliary passage and a circuit chamber, and a flow rate detection sensor. The flow rate detection sensor has a diaphragm in which a flow rate detection unit is formed on a main surface, a recessed section formed on the reverse-surface side of the diaphragm, and a package part having a first package section and a second package section, the first package section being positioned in the auxiliary passage, and the second package section being positioned in the circuit chamber. An airflow passage linked to the recessed section is formed in the interior of the package part. The recessed section communicates with the auxiliary passage via a plurality of ventilation pathways that communicate with the auxiliary passage via the airflow passage.
Inventors:
SHIBATA MIZUKI (JP)
YOGO TAKAYUKI (JP)
ZHANG LINLIN (JP)
YOGO TAKAYUKI (JP)
ZHANG LINLIN (JP)
Application Number:
PCT/JP2021/039381
Publication Date:
May 04, 2023
Filing Date:
October 26, 2021
Export Citation:
Assignee:
HITACHI ASTEMO LTD (JP)
International Classes:
G01F1/684
Domestic Patent References:
| WO2015033589A1 | 2015-03-12 | |||
| WO2020202791A1 | 2020-10-08 |
Attorney, Agent or Firm:
SHIN-YU INTERNATIONAL PATENT FIRM (JP)
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