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Title:
DEVELOPING SOLUTION AND METHOD FOR PRODUCTION OF FINELY PATTERNED MATERIAL
Document Type and Number:
WIPO Patent Application WO/2008/088076
Kind Code:
A1
Abstract:
Disclosed is a developing solution comprising an aqueous alkali solution, at least one anion selected from a silicate ion, a carbonate ion, a borate ion and a phosphate ion, and at least one cation selected from an ammonium ion, an organic ammonium ion and an alkali metal ion. The aqueous alkali solution may be an aqueous solution of a tetra-alkyl ammonium hydroxide.

Inventors:
SAITO NORIYUKI (JP)
ADACHI NORIO (JP)
Application Number:
PCT/JP2008/050931
Publication Date:
July 24, 2008
Filing Date:
January 17, 2008
Export Citation:
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Assignee:
SONY CORP (JP)
SAITO NORIYUKI (JP)
ADACHI NORIO (JP)
International Classes:
G03F7/32; G11B7/26
Foreign References:
JPH08220775A1996-08-30
JPH08234447A1996-09-13
JPH0798506A1995-04-11
JP2003022582A2003-01-24
JP2006179140A2006-07-06
JP2001033981A2001-02-09
JPH07326077A1995-12-12
JP2006277831A2006-10-12
JPH06132188A1994-05-13
JPH0869960A1996-03-12
JP2004172272A2004-06-17
JP2003315988A2003-11-06
JP2004152465A2004-05-27
JP2005300694A2005-10-27
JP2005049542A2005-02-24
US5853963A1998-12-29
JPH022572A1990-01-08
JP2001228628A2001-08-24
JP2002202616A2002-07-19
JPS52127338A1977-10-25
JPS5462004A1979-05-18
JPS577427B21982-02-10
JPH08160633A1996-06-21
JPH1165129A1999-03-05
JP2003015318A2003-01-17
JP2003035960A2003-02-07
JP2003043701A2003-02-14
JP2003043702A2003-02-14
JP2003057847A2003-02-28
JP2003057848A2003-02-28
JP2003057849A2003-02-28
JP2003107743A2003-04-09
JP2003270775A2003-09-25
JP2003270776A2003-09-25
Other References:
See also references of EP 2105798A4
JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 44, 2005, pages 3574 - 3577
Attorney, Agent or Firm:
SUGIURA, Masatomo (Metrocity Minami Ikebukuro29-12, Minami Ikebukuro 2-chom, Toshima-ku Tokyo 22, JP)
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