Title:
ENERGY DISPERSIVE X-RAY FLUORESCENT ANALYSIS DEVICE, EVALUATION METHOD, AND EVALUATION PROGRAM
Document Type and Number:
WIPO Patent Application WO/2021/124859
Kind Code:
A1
Abstract:
Provided is an energy dispersive X-ray fluorescent analysis device capable of easily determining the reliability of quantitative analysis results and promptly recognizing the presence of an abnormality when the abnormality is present in measurement conditions, in an X-ray fluorescent analysis device, a sample, a sample pretreatment, or the like. The energy dispersive X-ray fluorescent analysis device comprises: a spectrum acquisition unit which, on the basis of secondary X-rays emitted from a sample irradiated with primary X-rays, acquires a spectrum representing the relationship between the intensity and energy of the secondary X-rays; a calculation unit which quantitatively analyzes elements contained in the sample, on the basis of peaks contained in the spectrum; and an evaluation unit which evaluates the reliability of a series of processes including a process of acquiring, by the spectrum acquisition unit, the spectrum, and a process of performing quantitative analysis performed by the calculation unit.
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Inventors:
KIKUTA SHINYA (JP)
Application Number:
PCT/JP2020/044556
Publication Date:
June 24, 2021
Filing Date:
November 30, 2020
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/223
Foreign References:
| JP2010107261A | 2010-05-13 | |||
| JP2014173864A | 2014-09-22 | |||
| JP2019109201A | 2019-07-04 | |||
| JP2000065765A | 2000-03-03 |
Other References:
See also references of EP 4080201A4
Attorney, Agent or Firm:
HARUKA PATENT & TRADEMARK ATTORNEYS (JP)
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