Title:
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/047605
Kind Code:
A1
Abstract:
Provided is a film formation apparatus with which an anti-fouling film having high usability and anti-wear performance may be formed efficiently. According to a film formation apparatus (1) of the present invention, a substrate holder (12) which comprises a basal body holding surface for holding a plurality of substrates (14) is disposed in a vacuum container (10) in a rotatable manner. The film formation apparatus (1) comprises an evaporation source (34) which is disposed in the vacuum container (10) in such a manner that a larger amount of film formation material may be supplied to a first area (A3) that is part of the basal body holding surface than to an area other than the first area (remaining area) when operated toward the substrate holder (12) in a rotation stop state; and an ion source (38) which is disposed in the vacuum container (10) in such a manner, arrangement, and / or direction that energetic particle irradiation may be made toward only a second area (A2) that is part of the basal body holding surface when operated toward the substrate holder (12) in the rotation stop state.
Inventors:
SHIONO ICHIRO (JP)
HAYASHI TATSUYA (JP)
JIANG YOUSONG (JP)
NAGAE EKISHU (JP)
MIYAUCHI MITSUHIRO (JP)
SAMORI SHINGO (JP)
HAYASHI TATSUYA (JP)
JIANG YOUSONG (JP)
NAGAE EKISHU (JP)
MIYAUCHI MITSUHIRO (JP)
SAMORI SHINGO (JP)
Application Number:
PCT/JP2012/074755
Publication Date:
April 04, 2013
Filing Date:
September 26, 2012
Export Citation:
Assignee:
SHINCRON CO LTD (JP)
International Classes:
C23C14/02; C23C14/22
Domestic Patent References:
| WO2010018876A1 | 2010-02-18 |
Foreign References:
| JPS61288064A | 1986-12-18 | |||
| JP2005232534A | 2005-09-02 | |||
| JPH1171671A | 1999-03-16 | |||
| JPH10330940A | 1998-12-15 | |||
| JP2006022368A | 2006-01-26 | |||
| JP2007224335A | 2007-09-06 | |||
| JP2010090454A | 2010-04-22 | |||
| JPS6421973A | 1989-01-25 | |||
| JP2010090454A | 2010-04-22 |
Other References:
HYUN JU CHO ET AL.: "Optical inhomogeneity and microstructure of Zr02 thin films prepared by ion-assisted deposition", APPLIED OPTICS, vol. 35, no. 28, 1 October 1996 (1996-10-01), pages 5545 - 5552, XP055064644
See also references of EP 2762605A4
See also references of EP 2762605A4
Attorney, Agent or Firm:
OHKURA, Koichiro (JP)
Koichiro Okura (JP)
Koichiro Okura (JP)
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Claims: