HIGH TEMPERATURE SUBSTRATE TRANSFER ROBOT

Title:

HIGH TEMPERATURE SUBSTRATE TRANSFER ROBOT

Document Type and Number:

WIPO Patent Application WO2003007349

Kind Code:

A3

Abstract:

Generally, a robot for transferring a substrate in a processing system and a method of determining a position of the robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot. The robot maybe comprised of linkages fabricated from materials selected to minimize the effects of thermal changes.

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Inventors:

PENCIS CHRIS HOLT
HUDGENS JEFFREY C
COX DAMON KEITH
RICE MICHAEL
CIULIK JAMES R
FREEMAN MARVIN L
VAN GOGH DAVID A

Application Number:

PCT/US2002/022127

Publication Date:

September 18, 2003

Filing Date:

July 12, 2002

Export Citation:

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Assignee:

APPLIED MATERIALS INC (US)

International Classes:

B25J9/00; B25J9/10; B25J9/16; G05B19/404; H01L21/00; H01L21/677; H01L21/68; (IPC1-7): G05B19/404; G05D3/00; H01L21/00; B25J9/10; B23Q15/18

Domestic Patent References:

WO2000030172A2

2000-05-25

Foreign References:

EP0878267A1	1998-11-18
EP0858866A1	1998-08-19
US5980194A	1999-11-09
US5483138A	1996-01-09
US6166509A	2000-12-26
US5820965A	1998-10-13
US5681981A	1997-10-28

Other References:

DIPL.-ING. H.BAUER ET AL: "Automotive Handbook 4th edition", 1996, ROBERT BOSCH GMBH, GERMANY, XP002228116

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