Title:
SINGLE CRYSTAL PULLING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/223890
Kind Code:
A1
Abstract:
The present invention provides a single crystal pulling apparatus which comprises: a chamber; a crucible that is arranged within the chamber and retains a silicon melt; a pulling unit that comprises a pulling shaft, to one end of which a seed crystal is mounted, and a pulling drive unit, which rotates and vertically moves the pulling shaft, so as to pull a silicon single crystal; a heat shielding body which is arranged above the crucible so as to surround the silicon single crystal; and a magnetic field application unit which applies a horizontal magnetic field to the silicon melt in the crucible. The lower end of the heat shielding body is provided with a plurality of cuts that are arranged so as to be twofold symmetric about the pulling shaft.
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Inventors:
YOKOYAMA RYUSUKE (JP)
SUGIMURA WATARU (JP)
SUGIMURA WATARU (JP)
Application Number:
PCT/JP2023/017427
Publication Date:
November 23, 2023
Filing Date:
May 09, 2023
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
C30B29/06; C30B15/00
Foreign References:
| JP2019151502A | 2019-09-12 | |||
| JP2001002492A | 2001-01-09 | |||
| JP2018104206A | 2018-07-05 | |||
| JP2016060667A | 2016-04-25 | |||
| JP2021088496A | 2021-06-10 |
Attorney, Agent or Firm:
KINOSHITA & ASSOCIATES (JP)
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