Title:
SMIF LOAD PORT INTERFACE INCLUDING SMART PORT DOOR
Document Type and Number:
WIPO Patent Application WO2003007347
Kind Code:
A3
Abstract:
A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and/or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.
Inventors:
ROSENQUIST FREDERICK T
Application Number:
PCT/US2002/021968
Publication Date:
August 14, 2003
Filing Date:
July 10, 2002
Export Citation:
Assignee:
ASYST TECHNOLOGIES (US)
International Classes:
H01L21/68; B65G49/07; H01L21/00; H01L21/677; (IPC1-7): H01L21/00
Foreign References:
| EP0827185A2 | 1998-03-04 | |||
| US6213853B1 | 2001-04-10 | |||
| EP0541865A1 | 1993-05-19 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 08 6 October 2000 (2000-10-06)
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