Title:
THERMO-OPTIC PHASE SHIFTER AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2008/047634
Kind Code:
A1
Abstract:
Disclosed is a thermo-optic phase shifter (200) comprising a substrate (201),
a sacrificial layer (202) formed on the substrate (201), a first cladding layer
(203) formed on top of the sacrificial layer (202) and having a film density higher
than that of the sacrificial layer (202), an optical waveguide core (204) formed
on top of the first cladding layer (203), a second cladding layer (205) so formed
on the first cladding layer (203) as to cover the optical waveguide core (204),
a heat-generating heater (206) formed on the second cladding layer (205) immediately
above the optical waveguide core (204), and a groove (207) formed in the lateral
side region of the optical waveguide core (204) and extending from the surface
of the second cladding layer (205) to the surface of the substrate (201).
More Like This:
Inventors:
TAKAHASHI MORIO (JP)
Application Number:
PCT/JP2007/069715
Publication Date:
April 24, 2008
Filing Date:
October 10, 2007
Export Citation:
Assignee:
NEC CORP (JP)
TAKAHASHI MORIO (JP)
TAKAHASHI MORIO (JP)
International Classes:
G02F1/01
Foreign References:
| JP2004037524A | 2004-02-05 | |||
| JP2003287641A | 2003-10-10 | |||
| JP2003513328A | 2003-04-08 |
Attorney, Agent or Firm:
IEIRI, Takeshi (Asahi Bldg. 10th Floor3-33-8, Tsuruya-cho, Kanagawa-k, Yokohama-shi Kanagawa 35, JP)
Download PDF:
Previous Patent: ALIPHATIC COMPOUND-CONTAINING SKIN WHITENING AGENT
Next Patent: METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
Next Patent: METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE