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Title:
【発明の名称】結晶成長方法
Document Type and Number:
Japanese Patent JP2507904
Kind Code:
B2
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Inventors:
MIKI ICHIJI
SAKAMOTO KUNIHIRO
SAKAMOTO SUMINORI
MATSUBATAKE HIROFUMI
OKUMURA HAJIME
YOSHIDA SADAJI
Application Number:
JP10970091A
Publication Date:
June 19, 1996
Filing Date:
April 15, 1991
Export Citation:
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Assignee:
KOGYO GIJUTSUIN
International Classes:
H01L21/20; (IPC1-7): H01L21/20
Domestic Patent References:
JP2114648A
JP379088A
Attorney, Agent or Firm:
Director, Electronic Technology Research Institute, AIST



 
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