Title:
基板待機装置およびそれを備えた基板処理装置
Document Type and Number:
Japanese Patent JP4133489
Kind Code:
B2
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Inventors:
Naoyuki Osada
Naohisa Okada
Shigeki Minami
Naohisa Okada
Shigeki Minami
Application Number:
JP2003081032A
Publication Date:
August 13, 2008
Filing Date:
March 24, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B65G49/06; H01L21/677; B65G49/07; G02F1/13; H01L21/00; H01L21/30; H01L21/304; H01L21/68; H01L21/84
Domestic Patent References:
| JP8064655A | ||||
| JP10310240A | ||||
| JP2002329661A | ||||
| JP10154652A | ||||
| JP9199460A |
Attorney, Agent or Firm:
Yoshito Fukushima