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Title:
容量素子、半導体装置およびその製造方法
Document Type and Number:
Japanese Patent JP4256670
Kind Code:
B2
Abstract:
A capacitor includes a pair of electrodes and a ferroelectric film sandwiched between the electrodes. The electrodes are provided perpendicular to the direction of the polarization axis of the ferroelectric film.

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Inventors:
丸山 研二
Application Number:
JP2002358093A
Publication Date:
April 22, 2009
Filing Date:
December 10, 2002
Export Citation:
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Assignee:
富士通株式会社
International Classes:
H01L21/8246; H01L27/105; H01L21/02; H01L27/115; H01L27/11507; H01L21/768
Attorney, Agent or Firm:
伊東 忠彦



 
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