基板処理方法および基板処理装置

Title:

基板処理方法および基板処理装置

Document Type and Number:

Japanese Patent JP6461749

Kind Code:

B2

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Inventors:

Katsuhiro Sato
Junichi Igarashi
Yoshihiro Ogawa

Application Number:

JP2015167037A

Publication Date:

January 30, 2019

Filing Date:

August 26, 2015

Export Citation:

Assignee:

Toshiba Memory Corporation

International Classes:

H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Takeyuki Suzuki

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