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Title:
プラズマ処理装置のクリーニング方法及びクリーニング装置
Document Type and Number:
Japanese Patent JP6638360
Kind Code:
B2
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Inventors:
Numao Yoshiyuki
Tatsuo Nagai
Application Number:
JP2015239562A
Publication Date:
January 29, 2020
Filing Date:
December 08, 2015
Export Citation:
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Assignee:
Kurita Water Industries Ltd.
International Classes:
H01L21/3065
Domestic Patent References:
JP2008235562A
JP2007531996A
Foreign References:
WO2006082724A1
US20130186431
WO2010038371A1
Attorney, Agent or Firm:
Yuji Hayakawa
Keisuke Murasame



 
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