Title:
【発明の名称】光位置検出素子
Document Type and Number:
Japanese Patent JPH07118550
Kind Code:
B2
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Inventors:
Akihiko Asano
Application Number:
JP21985287A
Publication Date:
December 18, 1995
Filing Date:
September 02, 1987
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
G01B11/00; H01L31/16; (IPC1-7): H01L31/16
Domestic Patent References:
| JP59127883A | ||||
| JP62264678A |
Attorney, Agent or Firm:
Iwao Yamaguchi
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