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Document Type and Number:
Japanese Patent JPS5121780
Kind Code:
A
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Inventors:
HAYASHIDA TETSUYA
NOZAWA HARUO
PPONMA YOSHIO
HARADA TADAYOSHI
Application Number:
JP9416374A
Publication Date:
February 21, 1976
Filing Date:
August 19, 1974
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L21/60; H01L21/28; H01L23/12; (IPC1-7): H01L23/12; H01L23/54



 
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