Title:
ALIGNMENT UNIT FOR SEMICONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JPS5472674
Kind Code:
A
Abstract:
PURPOSE:To enable to align with the simple signal processing by means of less number of photo detecting elements, by making drive-control for XY stand sequentially feeding elements with the position detection analogically for Y direction and digitally for X direction with the photo detection element group arranged to one direction sequentially. CONSTITUTION:The XY stand is moved to X direction and arranged so that it clips the image of the element for the photo element groups 3 and 4 toward Y opposingly. When the element 100 is moved by about a given feed distance xp and the signal of the group 3 is outputted to the gate 5, the signal of three elements of the element group 3 is processed for operations 6, 7 and normalized with the value of the photo detection element 3b, and the positions of the both ends toward the Y direction of the element 100 are analogically obtained with further operation 9. The X coordinate adds 8 the signal group of the element group 3 and gates the counter 10, driving the pulse motor. If there is a defective mark on the element, the amount of photo reception is reduced and defective signal is caused via the quantized circuit 13 and the OR circuit 15.
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Inventors:
TSUMURA KAZUHIRO
ARIMURA YOSHIAKI
HITOMI YUTAKA
ARIMURA YOSHIAKI
HITOMI YUTAKA
Application Number:
JP13947677A
Publication Date:
June 11, 1979
Filing Date:
November 22, 1977
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L21/68; H01L21/58; (IPC1-7): H01L21/58; H01L21/68