CANTILEVER HAVING MULTIPLE ELECTRODE AND ITS MANUFACTURING METHOD

Japanese Patent JP3756470

B2

PROBLEM TO BE SOLVED: To provide a cantilever manufactured easily and provided with a plurality of multifunctional electrodes having a minute structure and to provide its manufacturing method. SOLUTION: In the method for manufacturing the cantilever provided with a plurality of the electrodes forming a plurality of opposite electrodes with a minute gap at a tip of the cantilever, the cantilever 1 for forming a probe is prepared, a first layer 2 easily dissolving in acid or alkali is formed on the cantilever 1, a photoresist 3 is formed on the first layer 2, a stripe 3A is formed by photolithographic etching, amorphous carbon 4 is deposited on the stripe 3A by an electron beam exciting deposition method, a bridge is formed, the first layer 2 is partially removed by using the amorphous carbon 4 as a mask and the cantilever 1 is manufactured and has the formed opposite electrodes 5 with the air gap 6.