CAPACITOR AND MANUFACTURE THEREOF - Matsushita Electronics Industrial Co., Ltd.

Title:

CAPACITOR AND MANUFACTURE THEREOF

Document Type and Number:

Japanese Patent JP3226329

Kind Code:

B2

Abstract:

PURPOSE: To provide a high-voltage capacitor having an amorphous layer between its metallic film and insulating film so as to decrease leakage current.
CONSTITUTION: A capacitor includes a first TiN film 2 on one surface of a substrate 1, a (BaxSr1-x) TiO3 3 on the first TiN film 2, and a second TiN film 6 above, not in contact with, the first TiN film. An amorphous layer 5 is inserted either between the (BaxSr1-x) TiO3 3 and either the first or second TiN film 2.

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Inventors:

Yasuhiro Shimada
Akihiro Matsuda
Toru Nasu
Maki Kibe
Eiji Fujii

Application Number:

JP15325692A

Publication Date:

November 05, 2001

Filing Date:

June 12, 1992

Export Citation:

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Assignee:

Matsushita Electronics Industrial Co., Ltd.

International Classes:

H01G4/33; H01G4/06; H01G4/30; H01L21/822; H01L27/04; H01L27/105; (IPC1-7): H01G4/33; H01L21/822; H01L27/04; H01L27/105

Domestic Patent References:

JP1315124A
JP451407A
JP338008A

Attorney, Agent or Firm:

Fumio Iwahashi (2 others)

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