Title:
高密度３次元集積コンデンサ
Document Type and Number:
Japanese Patent JP5895000
Kind Code:
B2
Abstract:
A component 10 includes a substrate 20 and a capacitor 40. The substrate 20 can have first and second surfaces 21, 22 and an opening 30 extending from the first surface. The capacitor 40 can include first, second, third, and fourth conductive plates 61, 62, 71, 72, each plate extending along an inner surface 31 of the opening 30. The capacitor 40 can include first and second electrodes 163, 164 exposed at first and second spaced apart locations, and third and fourth electrodes 173, 174 exposed at third and fourth spaced apart locations. The third plate 71 can overlie the first plate 61 and can be separated therefrom by a first dielectric layer 81. The second plate 62 can overlie the third plate 71 and can be separated therefrom by a second dielectric layer 82. The fourth plate 72 can overlie the second plate 62 and can be separated therefrom by a third dielectric layer 83.
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Inventors:
Mohammed, Ilyas
Herba, Bergasem
Uzo, Cyprian
Savaria, Peyush
Oganesian, Vage
Herba, Bergasem
Uzo, Cyprian
Savaria, Peyush
Oganesian, Vage
Application Number:
JP2013543160A
Publication Date:
March 30, 2016
Filing Date:
July 14, 2011
Export Citation:
Assignee:
Tessera, Inc.
International Classes:
H01G2/06; H01G4/33; H01L21/3205; H01L21/768; H01L21/822; H01L23/12; H01L23/15; H01L23/522; H01L27/04; H05K1/16
Domestic Patent References:
| JP2009515356A | ||||
| JP5198741A | ||||
| JP2009049212A | ||||
| JP2007516589A |
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Ayako Nakamura
Satoshi Morimoto
Kyoko Tsunoda
Yu Tanaka
Tokumoto Koichi
Atsushi Watanabe
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Ayako Nakamura
Satoshi Morimoto
Kyoko Tsunoda
Yu Tanaka
Tokumoto Koichi
Atsushi Watanabe