化合物半導体装置 - 富士通株式会社

Title:

化合物半導体装置

Document Type and Number:

Japanese Patent JP4228250

Kind Code:

B2

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Inventors:

Tsuyoshi Takahashi
Naoya Okamoto

Application Number:

JP34256298A

Publication Date:

February 25, 2009

Filing Date:

December 02, 1998

Export Citation:

Assignee:

富士通株式会社

International Classes:

H01L21/338; H01L29/73; H01L21/331; H01L29/737; H01L29/778; H01L29/78; H01L29/812; H01L29/20

Domestic Patent References:

Attorney, Agent or Firm:

Shoji Kashiwaya
Koichi Watanabe
Manabe Kiyoshi

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