PURPOSE: To minimize respective oxidizing reactions in an inlet-side spare chamber and in an outlet-side spare chamber and to stably obtain an oxide film of correct thickness by specifying respective dew points and temps. in the above spare chambers.
CONSTITUTION: Spare chambers 2,3 are provided to the inlet-side and outlet-side of a reaction chamber 1, respectively, and further, a decoiling chamber 4 and a coiling chamber 5 are provided to the inlet side of the spare chamber 2 and the outlet side of the spare chamber 3, respectively. While passing an Al foil 20 decoiled from the decoiling chamber 4 through the spare chamber 2, the reaction chamber 1, and the spare chamber 3 and coiling the foil 20 in the coiling chamber 5, atmospheric heating is continuously applied to this Al foil 20 in the reaction chamber 1. In this continuous atmospheric heating for the Al foil, the dew point and the heating temp. in the spare chambers 2,3 are set at ≤-40°C and ≤80°C, respectively. By this method, a risk of the occurrence of oxidizing reactions in the spare chambers can be reduced and oxidizing reaction can be accelerated in the reaction chamber 1 alone, and the oxide film like the one previously set up can be obtained securely and stably.
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KATO YUTAKA
NUMAO SHINJI
TADA KIYOSHI
