Title:
DEVELOPING SOLUTION FEEDING METHOD AND DEVELOPING DEVICE
Document Type and Number:
Japanese Patent JP3912920
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To perform uniform development by supplying a developing solution over the entire surface of the substrate.
SOLUTION: A developing solution feeding nozzle 20, provided with a counter surface 21 to the substrate W retained by a spinchuck, and the substrate W retained by the spinchuck are brought closer, and the developing solution Q, which is fed through a porous material 23, is fed to the substrate W in the state wherein the developing solution Q fed through a porous material is interposed between them, and the developing solution feeding nozzle 20 and the substrate W are relatively displaced, thereby filling the substrate W with the developing solution.
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Inventors:
Shigehiro Goto
Akiko Tanaka
Osamu Tamada
Noriaki Matsunaga
Akiko Tanaka
Osamu Tamada
Noriaki Matsunaga
Application Number:
JP35130898A
Publication Date:
May 09, 2007
Filing Date:
December 10, 1998
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; G03F7/30; (IPC1-7): H01L21/027; G03F7/30
Domestic Patent References:
| JP60140350A | ||||
| JP1043452B2 | ||||
| JP5090151A | ||||
| JP7326554A | ||||
| JP200058435A | ||||
| JP200068197A | ||||
| JP200066414A | ||||
| JP2000124126A |
Attorney, Agent or Firm:
Tsutomu Sugiya
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