Title:
DEVICE FOR CORRECTION OF DEFECT AND METHOD FOR CORRECTING DEFECT
Document Type and Number:
Japanese Patent JP3905299
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device for correction of defects and a method for correcting defects to make high quality correction possible without giving damages on the corrected face.
SOLUTION: After an air cylinder 15 is stroked to the lowest end, a Z-axis table 3 is driven at a low speed to a preliminarily determined distance to lower a scratch needle 19 to nearly touch an electrode pattern 22 or a glass substrate 21. While the air cylinder 15 is kept at the lowest end, the Z-axis table 3 is lifted, a slider 17 is brought into contact with a stopper 20, and an X-axis table and Y-axis table 2 are driven to operate the scratch needle 19 in the horizontal direction to remove a defect.
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Inventors:
Masahiro Saruta
Akihiro Yamanaka
Akihiro Yamanaka
Application Number:
JP2000328828A
Publication Date:
April 18, 2007
Filing Date:
October 27, 2000
Export Citation:
Assignee:
ntn corporation
International Classes:
G02B5/20; G02F1/13; G09F9/00; H01J9/20; H01J9/50; H01J11/22; H01J11/34; H01J17/04; (IPC1-7): G02B5/20; G02F1/13; G09F9/00; H01J9/50; H01J11/02; H01J17/04
Domestic Patent References:
| JP11191374A | ||||
| JP9236933A | ||||
| JP5256793A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Hiroyuki Yoshida
Hidehiko Ito
Toshio Morita
Hiroyuki Yoshida
Hidehiko Ito