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Title:
ELECTRON RAY APPLICATION DEVICE
Document Type and Number:
Japanese Patent JPS5468149
Kind Code:
A
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Inventors:
OOI HIDEYUKI
HOTSUTA MASANAO
SUGANUMA TADAO
Application Number:
JP13536277A
Publication Date:
June 01, 1979
Filing Date:
November 11, 1977
Export Citation:
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Assignee:
ERIONIKUSU KK
International Classes:
H01J37/153; H01J37/26; H01J37/28; H01J37/305; H01L21/027; H01L21/26; (IPC1-7): H01J37/26; H01L21/26
Domestic Patent References:
JPS521869A1977-01-08



 
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