Title:
静電チャック及び処理装置
Document Type and Number:
Japanese Patent JP7234459
Kind Code:
B2
Abstract:
A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.
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Inventors:
Go Takahata
Tomohiro Nakasuji
Ryo Ito
Kentaro Seto
Yutaka Omoto
Hiroho Kitada
Kazumi Tanaka
Tomohiro Nakasuji
Ryo Ito
Kentaro Seto
Yutaka Omoto
Hiroho Kitada
Kazumi Tanaka
Application Number:
JP2022513924A
Publication Date:
March 07, 2023
Filing Date:
December 24, 2020
Export Citation:
Assignee:
Tocalo Co., Ltd.
Hitachi High-Tech Co., Ltd.
Hitachi High-Tech Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2004055909A | ||||
| JP2002083861A | ||||
| JP9069554A | ||||
| JP6000737A | ||||
| JP8274151A |
Attorney, Agent or Firm:
Patent Attorney Corporation Suncrest International Patent Office