Title:
FILM DEPOSITION DEVICE
Document Type and Number:
Japanese Patent JP2011184750
Kind Code:
A
Abstract:
To suppress temperature control variation of a substrate and to film-deposit a film of high quality with satisfactory reproducibility.
In a film-deposition device having a film deposition container, a substrate holding part holding a substrate, a film-deposition source disposed in a position opposed to the substrate and a shutter which is disposed between the substrate holding part and the film-deposition source and can be opened and closed, the shutter 20 is constituted of a material radiating heat generated from the film-deposition source and plasma to the substrate side. The shutter material having a radiation ratio of 0.70 or above at a film-deposition temperature is used.
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Inventors:
AIMONO TAKANORI
YASUDA YOSHIAKI
YASUDA YOSHIAKI
Application Number:
JP2010052060A
Publication Date:
September 22, 2011
Filing Date:
March 09, 2010
Export Citation:
Assignee:
STANLEY ELECTRIC CO LTD
International Classes:
C23C14/24
Domestic Patent References:
JPS62111485A | 1987-05-22 | |||
JP2004035958A | 2004-02-05 | |||
JP2006097069A | 2006-04-13 | |||
JP2007329206A | 2007-12-20 | |||
JP2004193360A | 2004-07-08 | |||
JP2001234331A | 2001-08-31 | |||
JP2003023319A | 2003-01-24 | |||
JP2009019233A | 2009-01-29 | |||
JP2007138193A | 2007-06-07 | |||
JPH04350164A | 1992-12-04 | |||
JP2001234331A | 2001-08-31 | |||
JP2003023319A | 2003-01-24 | |||
JP2009019233A | 2009-01-29 | |||
JP2007138193A | 2007-06-07 | |||
JPH04350164A | 1992-12-04 |
Attorney, Agent or Firm:
Patent Business Corporation Sannozaka Patent Office
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