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Patent Searching and Data


Title:
FORMING METHOD OF LIQUID DISCHARGING HEAD AND FILM FORMATION METHOD
Document Type and Number:
Japanese Patent JP2004276380
Kind Code:
A
Abstract:

To form thin films of the same composing materials and different composition ratios such as a heating element and a cavitation resistant layer of a printer head by sputtering using one kind of a target in an application to, for example, an inkjet printer by a thermal system.

The liquid discharging head 11 is configured to eject liquid droplets of a liquid from predetermined nozzles by heating the liquid held in a liquid chamber through driving of a heating element 20. Moreover, the heating element and a protecting layer 26 provided at a face of the heating element side of the liquid chamber to protect the heating element are formed by sputtering using the targets of the same composing materials and the same composition ratio of the composing materials while a distance L to the target is made different. The heating element and the protecting layer 26 are formed of the same composing materials by desired different composition ratios of the composing materials.


Inventors:
MIYAMOTO TAKAAKI
TATEISHI OSAMU
Application Number:
JP2003070085A
Publication Date:
October 07, 2004
Filing Date:
March 14, 2003
Export Citation:
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Assignee:
SONY CORP
International Classes:
B41J2/16; (IPC1-7): B41J2/16
Attorney, Agent or Firm:
Shigenori Tada