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Title:
【発明の名称】引上結晶の重量測定方法および装置
Document Type and Number:
Japanese Patent JP2710289
Kind Code:
B2
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Inventors:
Shinichi Sawada
Masami Ryumi
Application Number:
JP12597789A
Publication Date:
February 10, 1998
Filing Date:
May 18, 1989
Export Citation:
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Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B15/28; C30B27/02; H01L21/208; (IPC1-7): C30B27/02; C30B15/28
Domestic Patent References:
JP62187198A
JP1108195A
Attorney, Agent or Firm:
Tetsuji Ueshiro (2 outside)



 
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