PURPOSE: To effect the automatic movement or a target to be measured in response to a screen display of layout data.

CONSTITUTION: Transmitted from a graphic display processing unit 1 to a control unit 12 is data about center coordinates and the magnifying factor of a screen display. The setting of the magnifying factor of a TV camera 10, for use in magnification, and the travel of a movable stage 6 are carried out on the basis of that data. As a result of this, it becomes possible to set the actual location of an inspection target, which location corresponds to a layout data, and bring a microprobe in contact with the target only by displaying the layout data and a magnified desired location without the preparation of a layout drawing, thereby reducing the inspection time.