Title:
LAMINATED PIEZOELECTRIC ACTUATOR
Document Type and Number:
Japanese Patent JPH04284680
Kind Code:
A
Abstract:
PURPOSE:To obtain a laminated piezoelectric actuator, providing a large amount of displacement, high in reliability and can be manufactured efficiently in a simplified process, by a method wherein the shortest distance between a via and electrode patterns in the same layer of piezoelectric ceramic layers is made larger than the distance between the electrode patterns in the layers, which are laminated adjoining each other, and the like. CONSTITUTION:A plurality of piezoelectric ceramic layers 3 are fired integrally with an electrode material and laminated and at the same time, electrodes 2 between the layers are connected to each other by a via 1 formed in the layers 3. In such a laminated piezoelectric actuator, the shortest distance L between the via 1 and the electrode patterns 2 to be installed from the via 1 in the same layer and the distance D between the electrode patterns 2 in the layers, which are laminated adjoining each other, are set so as to satisfy the relation of L>D. In the case the actuator has pads 4 at the connection parts between the vias 1, the shortest distance S between the patterns 2 and the pads 4 in the layers, in which the pads 4 are formed on electrode pattern formation surfaces, and the distance D are set so as to satisfy the relation of S>D.
More Like This:
Inventors:
TSUKADA MINEHARU
OMOTE KOJI
KAMEHARA NOBUO
OMOTE KOJI
KAMEHARA NOBUO
Application Number:
JP4844991A
Publication Date:
October 09, 1992
Filing Date:
March 13, 1991
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L41/083; H01L41/09; (IPC1-7): H01L41/09
Attorney, Agent or Firm:
Yasuo Ishikawa