Title:
酸素含有被処理体の処理方法及び処理装置
Document Type and Number:
Japanese Patent JP7153499
Kind Code:
B2
Abstract:
There is provided a method of processing an oxygen-containing workpiece. The method of processing an oxygen-containing workpiece includes controlling a fluorine concentration in the oxygen-containing workpiece based on at least one of a kind of a fluorine-containing processing gas, a processing temperature and a processing pressure used for processing the oxygen-containing workpiece.
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Inventors:
Reikou Sasahara
Yasuo Nakatani
Keiko Haneda
Yasuo Nakatani
Keiko Haneda
Application Number:
JP2018149721A
Publication Date:
October 14, 2022
Filing Date:
August 08, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/302; H01L21/3065; H01L21/677
Domestic Patent References:
| JP2016011252A |
Foreign References:
| US9768034 |
Attorney, Agent or Firm:
Kanemoto Tetsuo
Koji Hagiwara
Naoki Ogita
Koji Hagiwara
Naoki Ogita