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Title:
NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND STRING METHOD
Document Type and Number:
Japanese Patent JPH09162314
Kind Code:
A
Abstract:

To control a threshold value of a multivalue memory cell without being subjected to variations in manufacture and with good efficiency at the time of converging a threshold value of a memory cell on a prescribed value in order to realize the multivalue by a multivalue memory cell.

A floating gate electrode 3 is formed of polycrystalline silicon and impurity introduction is performed at a very low level or no introduction thereof is performed in order to hold electric conductivity in a state of high resistance. Further, at the time of writing a multivalue memory cell, an implantation region of electrons to be implanted into the floating gate electrode 3 is changed so as to control a channel resistance of the memory cell and to realize a different threshold value of the memory cell thus allowing a fine set-up of the threshold value and an easy memory of two bits (a state of four threshold values) in place of a conventional on bit (a state of two threshold values).


Inventors:
OKAZAWA TAKESHI
Application Number:
JP32288995A
Publication Date:
June 20, 1997
Filing Date:
December 12, 1995
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L21/8247; G11C11/56; G11C16/04; H01L27/115; H01L29/788; H01L29/792; (IPC1-7): H01L21/8247; H01L29/788; H01L29/792; H01L27/115
Domestic Patent References:
JPS5550667A1980-04-12
Attorney, Agent or Firm:
Wakabayashi Tadashi