Title:
OPTICAL WAVEGUIDE PLATFORM AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3228229
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the high-frequency characteristics of the electric signals of an optical waveguide platform constituted by forming an optical waveguide on a semiconductor substrate, mounting an optical element thereon and electrically connecting this element by electrode wiring and, on the other hand, to enhance the degree of the design freedom thereof and to simplify its production.
SOLUTION: This optical waveguide platform is constituted by forming the optical waveguide 4 consisting of a core 42 and clads 41, 43 by a quartz material on the Si substrate 1, mounting the optical element 8, such as laser diode, on the Si substrate 1 facing the optical waveguide end of the optical waveguide and forming the electrode wiring to execute the electrical connection to the optical element 8. The electrode wiring comprises the lower side electrode wiring 3 formed on the lower side of the optical waveguide 4, the upper electrode wiring 5 formed on the upper side of the optical waveguide 4 and a conductive contact 6 which is formed at the optical waveguide 4 and conducts the respective electrode wiring 3, 5 on the lower side and the upper side in a thickness direction.
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Inventors:
Takeshi Shimoda
Application Number:
JP16721398A
Publication Date:
November 12, 2001
Filing Date:
June 15, 1998
Export Citation:
Assignee:
NEC
International Classes:
G02B6/122; G02B6/13; G02B6/42; (IPC1-7): G02B6/122; G02B6/13; G02B6/42
Domestic Patent References:
| JP954229A | ||||
| JP6179290A |
Attorney, Agent or Firm:
Suzuki Akio