Title:
PROCESSING METHOD FOR WORKPIECE
Document Type and Number:
Japanese Patent JP2022124134
Kind Code:
A
Abstract:
To cut a workpiece so that the centers of processed grooves in a width direction on a back surface side and a front side of the workpiece are aligned with each other.SOLUTION: A method of processing a workpiece includes a holding step of holding a front surface side of the workpiece with a holding table having a region formed of a transparent material, and a processed groove forming step of forming a processed groove in the workpiece. The processed groove forming step includes a first imaging step of imaging a processed groove on a back surface side of the workpiece, a second imaging step of imaging the processed groove on the front surface side of the workpiece via the holding table, and a detection step of detecting whether the position of a first center line of the processed groove imaged in the first imaging step and the position of a second center line of the processed groove imaged in the second imaging step match each other within a predetermined plane. In the detection step, when the positions of the first and second center lines do not match each other within the predetermined plane, the processed groove forming step further includes a correcting step of correcting the position of the center of a cutting blade so that the positions of the first and second center lines match each other.SELECTED DRAWING: Figure 13
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Inventors:
KOJIMA YOSHIMASA
KUBO ATSUSHI
KUBO ATSUSHI
Application Number:
JP2021021725A
Publication Date:
August 25, 2022
Filing Date:
February 15, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B24B27/06; B24B47/22; B24B49/12
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato