Title:
PROTECTION SHEET FOR WORKPIECE PROCESSING AND METHOD FOR MANUFACTURING SINGULATED WORKPIECE
Document Type and Number:
Japanese Patent JP2023118530
Kind Code:
A
Abstract:
To provide a protection sheet for workpiece processing that can reduce defects in the singulated workpieces after grinding even when the singulated workpieces are obtained by grinding the workpieces by LDBG.SOLUTION: A workpiece processing protection sheet includes a base material and an adhesive layer disposed on one main surface of the base material, the shear storage modulus of the adhesive layer at 55°C is 40,000 Pa or more, the shear stress relaxation rate of the adhesive layer after 1 second at 55°C is 30% or more, and at 23°C, the elongation of the workpiece processing protection sheet is 2.5% or less when the tensile load reaches 30 N/15 mm after starting to apply the tensile load to the workpiece processing protection sheet.SELECTED DRAWING: Figure 1A
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Inventors:
OKURA YAMATO
HASEGAWA YUYA
TAMURA KAZUYUKI
HASEGAWA YUYA
TAMURA KAZUYUKI
Application Number:
JP2022021527A
Publication Date:
August 25, 2023
Filing Date:
February 15, 2022
Export Citation:
Assignee:
LINTEC CORP
International Classes:
H01L21/301; C09J5/00; C09J7/38; C09J133/00; C09J201/00; H01L21/304; H01L21/683
Attorney, Agent or Firm:
Maeda Suzuki International Patent Attorneys Corporation
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