PURPOSE: To decrease the dust production in a vacuum vessel, the impact during rotation and the defects of products by performing the driving power transmission of the rotating motion of a mounting plate for objects to be vapor- deposited by means of a gear-like disc and permanent magnets in the absence of contact.

CONSTITUTION: As a motor 25 is run, a revolving shaft 22, that is, a gear-like desc 28 is revolved in an arrow 40 derection by means of gears 26, 27 and a holding frame 24. When the revolving motion is accomplished continuously, the disc 28 rotates continuously in an arrow 41 direction. Hence, a mounting plate 21 for objects to be vapor-deposited are revolved and rotated by means of the shaft 22 fixed to the disc 28. In this case, permanent magnets 29 are disposed on the revolving track by maintaining a micro-clearance from the teeth parts of the disc 28,and in order to decrease pulsation, the magnets 29 are fixed to a magnet fixing ring 30 by means of a set fitting 43 at the intervals approximately equal to the tooth pitches of the disc 28. Hence, the disc 28 and the magnets 29 are not in contact with each other, thus the production of the worn powder of vapor-depositing objects is decreased and the impact during rotation is decreased as well.