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Title:
TOOL, TOOL SET, AND METHOD FOR GAP CONFIRMATION AND THIN FILM FORMING METHOD
Document Type and Number:
Japanese Patent JP2010266360
Kind Code:
A
Abstract:

To provide a gap confirmation tool, capable of verifying the size of a gap across a pair of members which have surfaces facing each other, at an arbitrary location.

The gap confirmation tool includes both a head part 2 and a rod-like part 3, connected to the head part 2. In the head part 2 in its projected shape projected to a plane intersecting with the direction of extension of the rod-like part 3 at right angles, when the head part 2 is projected to the direction of extension of the rod-like part, the distance between two points farthest in linear terms from each other becomes a specified length, and the overall projected shape is contained within a virtual circle, having a radius equal to half the length of the regular length from the center between the two points.

COPYRIGHT: (C)2011,JPO&INPIT


Inventors:
ISHITSUBO KEI
KISHIMOTO KATSUSHI
ISSHIKI KAZUHIKO
NOZAKI JUNICHI
ABE TAKAHIRO
NAKAMURA YOSHINOBU
NASUNO YOSHIYUKI
INUZUKA HIROYUKI
FUJII MAKOTO
HARA YOSHINORI
Application Number:
JP2009118566A
Publication Date:
November 25, 2010
Filing Date:
May 15, 2009
Export Citation:
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Assignee:
SHARP KK
International Classes:
G01B3/30; C23C16/50
Domestic Patent References:
JPS5836305U1983-03-09
JPS5014849U1975-02-17
JP2006120926A2006-05-11
JPS6119703U1986-02-05
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki



 
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