Title:
APPARATUS FOR MANUFACTURING FRAME-INTEGRATED MASK
Document Type and Number:
WIPO Patent Application WO/2019/203510
Kind Code:
A1
Abstract:
The present invention relates to an apparatus for manufacturing a frame-integrated mask. The apparatus (10) for manufacturing a frame-integrated mask according to the present invention comprises: a stage part (20) on which a frame (200) is seated and supported; a grip part (30) for gripping a template (50) by which a mask (100) is adhesively supported; a grip moving part (40) for moving the grip part (30) in at least one of X, Y, Z, and θ axis directions; a head part (60) for emitting a laser beam to a weld part of the mask (100) and sensing an alignment state of the mask (100); and a head moving part (70) for moving the head part (60) in at least one of X, Y, and Z axis directions, wherein the grip part (30) adsorbs at least a portion of the upper surface of the template (50) to grip same.
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Inventors:
LEE BYUNG IL (KR)
JANG TAEK YONG (KR)
LEE YOO JIN (KR)
JANG TAEK YONG (KR)
LEE YOO JIN (KR)
Application Number:
PCT/KR2019/004445
Publication Date:
October 24, 2019
Filing Date:
April 12, 2019
Export Citation:
Assignee:
TGO TECH CORP (KR)
International Classes:
H01L51/56; H01L21/02
Foreign References:
| KR20130022586A | 2013-03-07 | |||
| KR20090052203A | 2009-05-25 | |||
| JP2015127441A | 2015-07-09 | |||
| KR20040084314A | 2004-10-06 | |||
| KR100742385B1 | 2007-07-24 |
Attorney, Agent or Firm:
KIM, Han (KR)
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