Title:
VISCOELASTIC POLISHER AND POLISHING METHOD USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2005/005100
Kind Code:
A1
Abstract:
A viscoelastic polisher used for polishing. In the viscoelastic polisher, a hole portion with a predetermined inner peripheral radius is formed in the center portion of the polisher and groove portions are formed in a main surface of a circular disk-like base plate on which the viscoelastic polisher is fixed, the groove portions being formed at equal angular intervals in a radial pattern from the center portion toward the outer periphery. The structure enables a polishing liquid to be stably fed and eliminates the need for the forming of groove portions in a viscoelastic layer unnecessary.
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Inventors:
NISHIHARA KAZUNARI
KURIYAGAWA TSUNEMOTO
KURIYAGAWA TSUNEMOTO
Application Number:
PCT/JP2004/010176
Publication Date:
January 20, 2005
Filing Date:
July 09, 2004
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
NISHIHARA KAZUNARI
KURIYAGAWA TSUNEMOTO
NISHIHARA KAZUNARI
KURIYAGAWA TSUNEMOTO
International Classes:
B24B37/20; B24B37/24; B24D13/14; (IPC1-7): B24B37/00
Foreign References:
| JPH09277163A | 1997-10-28 | |||
| JPS55129762U | 1980-09-13 | |||
| JP2003103470A | 2003-04-08 | |||
| JP2002307294A | 2002-10-23 | |||
| JP2003048156A | 2003-02-18 | |||
| JPS6299072A | 1987-05-08 |
Other References:
See also references of EP 1661665A4
Attorney, Agent or Firm:
Morimoto, Yoshihiro (4th Floor 10-10, Nishi-Hommachi 1-chome, Nishi-k, Osaka-shi Osaka 05, JP)
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