Title:
基板処理装置および基板処理方法
Document Type and Number:
Japanese Patent JP5497599
Kind Code:
B2
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Inventors:
Katsuhiko Miya
Masahiko Kato
Naosumi Fujiwara
Masahiko Kato
Naosumi Fujiwara
Application Number:
JP2010207899A
Publication Date:
May 21, 2014
Filing Date:
September 16, 2010
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304; B08B3/04; B08B3/10; G02F1/13; G02F1/1333
Domestic Patent References:
| JP2008159728A | ||||
| JP2000223394A | ||||
| JP2010080584A | ||||
| JP2009254965A | ||||
| JP8293479A | ||||
| JP2004153289A |
Attorney, Agent or Firm:
Kakusho Shoichi
Ryose Uji
Kazumasa Onishi
Ryose Uji
Kazumasa Onishi