PURPOSE: To easily improve machining speed by making optical path of beam on one side of the pulse laser beam longer than that on the other side to delay the arrival of the one side pulse laser beam.
CONSTITUTION: The pulse laser beam outputted from a laser beam generator 1 is decomposed into two by using a first half mirror 2, first mirror 3, second half mirror 4 and second mirror 5. Then, the optical path of beam on the one side of pulse laser beam is made to longer than the optical path of beam on the other side pulse laser beam. By this method, the arrival of the one side pulse laser beam is delayed and radiated on a material 73 to be machined as the following pulse. By this method, it is unnecessary to reconstruct the generator itself.
ITO KEIKO
INOUE MASAMI
OMINE MEGUMI
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