PATTERN FORMING METHOD, ITS CURED MATERIAL, AND CIRCUIT BOARD

Title:

PATTERN FORMING METHOD, ITS CURED MATERIAL, AND CIRCUIT BOARD

Document Type and Number:

Japanese Patent JP2007052359

Kind Code:

A

Abstract:

To provide a method of forming a cured material which deforms less before and after the postbaking by using a positive photosensitive resin composition.

This method include steps in this order: (1) a step of forming a coated film on a substrate by using a positive photosensitive insulation resin composition containing (A) an alkali solubile resin and (B) a quinonediazido group containing compound, (2) a step of partly exposing this film, (3) a step of developing, (4) a step of exposing the developed film, and (5) a step of heating.

More Like This:

JP2020064170	PHOTOSENSITIVE RESIN COMPOSITION, PATTERN CURED FILM AND METHOD FOR PRODUCING THE SAME, SEMICONDUCTOR ELEMENT, AND ELECTRONIC DEVICE
JP5504735	Positive type photosensitive resin composition, manufacturing method of pattern cured film and electronic parts
JP3436673	POSITIVE PHOTOSENSITIVE RESIN COMPOSITION AND MANUFACTURE OF RELIEF PATTERN

Inventors:

SASAKI HIROBUMI
HASHIGUCHI YUICHI
ITO JUNJI
GOTO HIROFUMI

Application Number:

JP2005238854A

Publication Date:

March 01, 2007

Filing Date:

August 19, 2005

Export Citation:

Click for automatic bibliography generation Help

Assignee:

JSR CORP

International Classes:

G03F7/023; G03F7/004; G03F7/40; H05K3/00

Domestic Patent References:

JP2004333963A	2004-11-25
JP2004240144A	2004-08-26
JP2004163923A	2004-06-10
JP2003215802A	2003-07-30
JP2002287351A	2002-10-03
JP2002139835A	2002-05-17
JP2005506579A	2005-03-03
JP2002341521A	2002-11-27
JPH0643637A	1994-02-18
JP2003114529A	2003-04-18
JP2003215789A	2003-07-30

Foreign References:

WO2003029898A1

2003-04-10

Attorney, Agent or Firm:

Shunichiro Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki

Previous Patent: 電気的接続装置

Next Patent: COLOR FILTER SUBSTRATE, LIQUID CRYSTAL DISPLAY PANEL, AND METHOD FOR MANUFACTURING A PLURALITY OF CO...