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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
Document Type and Number:
Japanese Patent JP2007103694
Kind Code:
A
Abstract:

To enable two or more gate electrodes of different length to have each an FUSI structure uniform in composition independently of the length of a gate.

A semiconductor device is equipped with a first gate electrode 14T1 and a second gate electrode 14T2 which are each formed into full silicide by metal, and different from each other in length. A U-shaped groove whose periphery is high and gate-lengthwise center is low is formed at least on either the first gate electrode 14T1 or the second gate electrode 14T2. The width of the U-shaped groove is dependent on the gate length of the gate electrodes 14T1 and 14T2.


Inventors:
KUDO CHIAKI
Application Number:
JP2005292005A
Publication Date:
April 19, 2007
Filing Date:
October 05, 2005
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/28; H01L21/8234; H01L21/822; H01L27/04; H01L27/06; H01L27/088; H01L29/41; H01L29/423; H01L29/49; H01L29/78
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura